Product Description
0-1700c Vertical Openable Tube Furnace is an intelligent experimental equipment designed for high temperature material research and development and process validation, integrating high temperature heating, vacuum/atmosphere control and rapid heat treatment. It adopts vertical openable structure design and flexible configuration through modular components to meet the needs of all scenarios from basic material sintering to complex process development (e.g. CVD deposition, vacuum annealing).
Precise temperature control: 0-1700℃ wide temperature range coverage, combined with PID multi-stage programming and independent regulation of three temperature zones, to ensure high repeatability and process consistency of the material heating process.
Efficient operation: the furnace body can be separated vertically, with fast water cooling system, to achieve high temperature quenching treatment of samples within 10 seconds, significantly shortening the experimental cycle.
Safe and reliable: double-layer heat-insulating shell, magnetic fluid dynamic sealing and multiple safety interlock designs ensure long-term stable operation under flammable atmospheres such as hydrogen.
Intelligent expansion: support vacuum unit, gas analyser, rotary sample stage and other external modules, compatible with scientific research and innovation and industrial mass production needs.
Applicable customers: university materials labs, semiconductor device R&D centres, new energy battery material companies, aerospace high temperature parts manufacturers.
Core parameters
1. Heating system
Heating element: high-density silicon molybdenum rods (optional silicon carbide or graphite heating element, temperature resistance 1800 ℃)
Temperature control mode: PID intelligent regulation, support for constant temperature, step heating, cycle heating (maximum rate of 15 ℃ / min, cooling rate of 10 ℃ / min)
Temperature uniformity: ± 1.5 ℃ (within 150mm of the constant temperature zone, optimised by three temperature zones independent compensation)
Maximum power: by Size (support 220V/380V voltage customisation)
2. Furnace structure
Furnace chamber material: 1700 grade high purity alumina polycrystalline fibre (low heat capacity, strong thermal shock resistance)
Furnace tube specification:
Standard: outer diameter Φ60mm × length 1200mm corundum tube (optional quartz tube, stainless steel tube or customised material)
Pressure resistance: ≤ 0.1MPa (vacuum/positive pressure conditions)
Sealing system: double O-type fluorine rubber seals (temperature resistance 250 ℃) + water cooling flange (forced circulation cooling). Vacuum leakage rate: ≤5×10-⁴ Pa-m³/s (KF25 flange interface, need to be equipped with molecular pump unit)
3. Control system
Main controller: Japan Shimaden FP93 (or Continental 3504) programmable instrumentation, support for RS485 communication interface, 50-segment program settings, can store 10 groups of preset process
Safety protection: over-temperature automatic power-off, broken coupling alarm, water pressure/flow monitoring, gas pressure abnormal alarm, emergency relief valve (positive pressure protection), leakage protection circuit breaker.
Specification Description
Main structure: Vertical double-layer stainless steel shell, built-in air-cooling circulation system, external mobile wheels and horizontal adjustment feet
Furnace pipe support: 316L stainless steel adjustable bracket, suitable for Φ30-100mm furnace pipe, including quartz cotton insulation sleeve.
Vacuum system (optional): rotary vane mechanical pump (ultimate vacuum 5×10-² Pa) or molecular pump unit (ultimate vacuum 5×10-⁴ Pa)
Gas circuit system: double-way mass flow meter (0-500sccm, accuracy ±1%), with pressure reducing valve, solenoid valve, gas filtration device
Optional features: sample rotation motor (0-30rpm), infrared thermometer, quenching module, exhaust gas treatment device
Safety and Maintenance
Use of the environment: temperature 10-30 ℃, humidity ≤ 70%, no corrosive gases, well ventilated, reserved ≥ 1m operating space.
Daily maintenance: clean the furnace dust every month, check the resistance value of the heating element (deviation>15% need to be replaced).
Quarterly replacement of seals, calibration of thermocouples and flowmeter accuracy
